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Identification
CAS Number
912290-04-1
Name
Triphenylsulfonium (3-hydroxytricyclodecane-1-methoxycarbonyl)difluoromethane sulfonate
Synonyms
Triphenylsulfonium (3-hydroxytricyclodecane-1-methoxycarbonyl)difluoromethane sulfonate
SMILES
C1C2CC3(CC1CC(C2)(C3)O)COC(=O)C(F)(F)S(=O)(=O).C1=CC=C(C=C1)(C2=CC=CC=C2)C3=CC=CC=C3
StdInChI
InChI=1S/C18H15S.C13H18F2O6S/c1-4-10-16(11-5-1)19(17-12-6-2-7-13-17)18-14-8-3-9-15-18;14-13(15,22(18,19)20)10(16)21-7-11-2-8-1-9(3-11)5-12(17,4-8)6-11/h1-15H;8-9,17H,1-7H2,(H,18,19,20)/q+1;/p-1
StdInChIKey
MMTQYTFKDNOQOV-UHFFFAOYSA-M
Molecular Formula
C31H32F2O6S2
Molecular Weight
602.7
Properties
Appearance
White to off-white powder
Safety Data
RIDADR
NONH for all modes of transport
Specifications and Other Information of Our Triphenylsulfonium (3-hydroxytricyclodecane-1-methoxycarbonyl)difluoromethane sulfonate CAS 912290-04-1
Identification Methods
HNMR, HPLC
Purity
99% min, 99.5% min
Total Heavy Metals Impurities
<100ppb,<50ppb
Shelf Life
2 years
Storage
Under room temperature away from light
Known Application
I. Core Function: Photoacid Generator (PAG)This compound is a triphenylsulfonium salt-based photoacid generator (PAG). Under UV or deep-UV (DUV) irradiation:It absorbs light and undergoes photolytic cleavageProduces a strong acid (difluoromethanesulfonic acid)The generated acid can catalyze chemically amplified reactions or initiate subsequent cationic polymerization. It is a key functional additive in photoresist and cationic photopolymer curing systems.II. Main Application Areas1.Semiconductor Photoresists (Chemically Amplified Photoresists, CARs)Applicable to:i-line, KrF, and ArF lithography systemsHigh-resolution chemically amplified photoresistsMain functions:Acid generation upon exposureCatalyzes deprotection reactionsAmplifies exposure effects → improves resolution, sensitivity, and critical dimension / line edge roughness (CD/LER) controlAdvantages of the adamantyl structure:Provides high thermal stabilityReduces acid diffusion → improves resolution and line edge roughnessEnhances optical performance and formulation stability of photoresists
- Cationic Photocuring SystemsUsed in UV-induced cationic curing of epoxy resins and vinyl ether materialsUV irradiation → acid generation → initiates cationic ring-opening polymerization or crosslinkingApplications include:UV-curable coatings and inksElectronic encapsulation materialsPhoto-patternable insulating layers (e.g., PSPI, PI)
Links
This product is developed by our R&D company WatsonChem Advanced Chemical Materials (https://www.watsonchem.com/).
Quick Inquiry
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