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- Properties
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Identification
CAS Number
345580-99-6
Name
Triphenylsulfonium, 2-hydroxybenzoate (1:1)
Synonyms
Triphenylsulfonium, 2-hydroxybenzoate;Triphenylsulfonium salicylate
SMILES
C1=CC=C(C=C1)(C2=CC=CC=C2)C3=CC=CC=C3.C1=CC=C(C(=C1)C(=O)O)
StdInChI
InChI=1S/C18H15S.C7H6O3/c1-4-10-16(11-5-1)19(17-12-6-2-7-13-17)18-14-8-3-9-15-18;8-6-4-2-1-3-5(6)7(9)10/h1-15H;1-4,8H,(H,9,10)/q+1;/p-1
StdInChIKey
KKLIEUWPBXKNFS-UHFFFAOYSA-M
Molecular Formula
C25H20O3S
Molecular Weight
400.5
Properties
Appearance
White to off-white powder
Safety Data
RIDADR
NONH for all modes of transport
Specifications and Other Information of Our Triphenylsulfonium, 2-hydroxybenzoate (1:1) CAS 345580-99-6
Identification Methods
HNMR, HPLC
Purity
99% min, 99.5% min
Total Heavy Metals Impurities
<100ppb,<50ppb
Shelf Life
2 years
Storage
Under room temperature away from light
Known Application
I. Core Function: Photoacid Generator (PAG)
This compound is a triphenylsulfonium salt-based photoacid generator (PAG). Under UV or deep-UV (DUV) irradiation:
It absorbs light and undergoes photolytic cleavage
Generates a strong acid
The generated acid can catalyze chemically amplified reactions or initiate subsequent cationic polymerization. It is a key functional additive in photoresist and cationic photopolymer curing systems.
II. Main Application Areas
1. Semiconductor Photoresists (Chemically Amplified Photoresists, CARs)
Applicable to:
i-line, KrF, and ArF lithography systems
High-resolution chemically amplified photoresists
Main functions:
Acid generation upon exposure
Catalyzes deprotection reactions
Amplifies exposure effects → improves resolution, sensitivity, and critical dimension / line edge roughness (CD/LER) control
Advantages of the ortho-hydroxybenzoate structure:
Provides good photosensitivity
Reduces acid diffusion, improving resolution
Works synergistically with the triphenylsulfonium cation → good thermal stability and stable photoresist performance
2. Cationic Photocuring Systems
Used in UV-induced cationic curing of epoxy resins and vinyl ether systems
UV irradiation → acid generation → initiates cationic ring-opening polymerization or crosslinking
Applications include:
UV-curable coatings and inks
Electronic encapsulation materials
Photo-patternable insulating layers (e.g., PSPI, PI)
Links
This product is developed by our R&D company WatsonChem Advanced Chemical Materials (https://www.watsonchem.com/).
Quick Inquiry
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