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Identification
CAS Number
175923-04-3
Name
TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM
Synonyms
Ethanamine, N-methyl-, zirconium(4+) salt (4:1)
MFCD03427131
Temaz
Tetrakis(ethylmethylamido)zirconium(IV)
Tetrakis(ethylmethylamino)zirconium(IV)
Tétrakis de zirconium(4+)
Zirconium(4+) tetrakis
Zirconium(4+)tetrakis
ETHYL(METHYL){TRISZIRCONIO}AMINE
temaz: zr4
TETRAKIS ZIRCONIUM
Tetrakis(ethylmethylamino)zirconium
ZIRCONIUM TETRAKIS(ETHYLMETHYLAMIDE)
Zirconium(4+)tetrakis
SMILES
CCN(C)(N(C)CC)(N(C)CC)N(C)CC
StdInChI
InChI=1S/4C3H8N.Zr/c41-3-4-2;/h43H2,1-2H3;/q4*-1;+4
StdInChIKey
SRLSISLWUNZOOB-UHFFFAOYSA-N
Molecular Formula
C12H32N4Zr
Molecular Weight
323.633
MDL Number
MFCD03427131
Properties
Appearance
Colorless to yellow liquid
Structure
Structure of TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM CAS 175923-04-3
Safety Data
Symbol
GHS02, GHS07
Signal Word
Warning
Hazard statements
H225 - H261 - H315 - H319 - H335
Precautionary Statements
P210 - P223 - P231 + P232 - P233 - P303 + P361 + P353 - P305 + P351 + P338
WGK Germany
3
MSDS Download
Specifications and Other Information of Our
Identification Methods
MS
Purity
99.99% min
Chloride ion
≤10ppm
Shelf Life
1 year
Known Application
TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM CAS 175923-04-3 may be used as a metal-organic precursor for thin film deposition in semiconductor manufacturing. It serves as a source of zirconium for the preparation of thin film coatings, such as in the fabrication of integrated circuits and other electronic devices.
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Links
This product is developed by our R&D company Warshel Chemical Ltd (https://www.warshel.com/).
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